Stand B1.121 · Hall B1, UK pavilion · Messe München · 10 to 13 Nov 2026
Engineered around your process.
Diffusion, LPCVD, vertical furnaces, epitaxy and chemical systems. 100 mm to 300 mm. R&D to high volume manufacturing. Process equipment since 1962.

New systemFind the right system in four tapsNo personal details needed.
Tools you runSpares, service and obsolescenceObsolescence check
At the showBook a meeting10 to 13 November
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Hall B1, UK pavilion
Messe München, 10 to 13 November 2026
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